中频定向凝固炉 定向凝固炉 多晶硅铸锭炉 拉晶炉

esot90系列拉晶炉主要用于半导体材料 高纯材料 超导材料的制备.如硅材料提纯.
多晶硅定向凝固炉（简称结晶炉）polycrystalline silicondirectional solidify furnace(crystallize furnace for short)
用于used in
太阳能级硅锭制造，也可以用于其他半导体材料提纯。
making solar energy silicon ingot and purifying other transistormaterials
特点feature
控制精度高，结晶速度自由调节
higher precision for the control and free adjusting crystallizespeed
采用感应熔炼法，增加溶液搅拌，熔炼速度快
adopt induction smelting, increase solution stirring and thesmelting speed is fast.
定向凝固保温采用特制加热电源
adopt specially made heating power for the directional solidifykeeping temperature
具有三相电流平衡，维护费用低
there are three-phase current balance and lower maintenance
采用恒温度控制仪，可设置148段加热工艺曲线
adopt constant temperature control apparatus and you can set 148heating technology curves
炉室采用三室真空炉体，真空度高，抽气速度快
adopt three-house vacuum chamber for the furnace with highervacuum and faster air pump
主要技术参数mainueparameters
熔炼容量：10-300kg capacity ofsmelting
电源功率：50-400kw power
升温速率：40℃/min raising temperaturespeed
炉温均匀性：±5℃ even quality of furnacetemperature
极限真空度：6.67×10-2pa limitvacuum
压升率：0.01pal/s rate of raising voltage
额定充气压力：0.05mpa rated giving airpressure
铸锭方式：下降定向凝固 the way of ingotcasting: descending directional solidify
伺服控制范围：0.01mm-6mm/min range forserve control
定向凝固速率：0.03mm-0.5mm/min rate ofdirectional solidify
坩埚上升速度：80-100 mm/min raising speedof crucible